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Mass Flow Controller

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Alicat - MFC

Product Description

Mass flow controllers (MFCs) were originally designed to take the guess work out of precision gas flow control. Today, the demand for accurate and repeatable gas flow control has spanned dozens of industries. Demand for mass flow controllers is growing and customers are requiring that MFCs are easy to use, fast, reliable, accurate, cost effective and robust.

The Alicat MC series mass flow controller is designed to meet the above requirements:

  • Simplicity
    The MC series mass flow controller is very easy to use. With the local display, users can make changes to the configuration of the unit without the need for computers, complicated software or scripts.
  • Mass Flow Controller Accuracy
    Alicat MC series mass flow controllers can be configured with an accuracy spec of up to +/-(0.4% of reading + 0.2% of full scale) with a high-accuracy calibration. Standard calibrations are rated at +/-(0.8% of reading + 0.2% of full scale)
  • Mass Flow Controller Repeatability
    Alicat's patented technology allow its mass flow controllers to have very few moving parts. All of the MFC's internal components are fixed in place resulting in very little physical change inside the MFC. Little physical change in the flow cavity means higher rates of consistency and repeatability. Alicat MC series mass flow controllers have a repeatability of +/-0.2% of FS
  • Reduced Cost of Ownership
    Alicat MC/MCP/MCR series and VC/VCP/VCR series flow controllers require very little power to run thereby reducing operating costs. MC and VC series flow controllers also have less pressure drop when compared to similar flow devices. Reduced pressure drop means more process fluids go into your process and not into your measurement devices. The MC series mass flow controllers also measure pressure, temperature and volumetric flow in addition to mass flow which means fewer instruments you will have to buy and install.
  • Control Speed
    The Alicat MC/MCP/MCR series mass flow controller has a response time of less than 10ms and a control time of 100ms making it one of the fastest naturally responding mass flow controllers on the market today.
  • Versatility
    MC series mass flow controllers are available in any flow range from 0.5SCCM through 1500SLPM. The MFCs are equipped with multiple analog outputs and inputs. Adding a totalizer allows users to see how much media has flowed through the MFC, making it a great way to monitor usage and identify waste.
    Alicat MC/MCP/MCR series MFCs can also be used in applications where flow control into a vacuum is critical. The modular design of the Alicat MC/MCP/MCR series MFC allows it to be used in systems in which flow is driven by a vacuum.
  • Dependability
    There are currently over 22,000 Alicat products in service around the world. Alicat mass flow controllers are being used in processes like pharmaceutical and semiconductor manufacturing, fuel cell research, auto paint application, and emissions compliance equipment.
    Alicat Scientific mass flow controller calibrations are NIST traceable.
  • Measured Parameters
    MC, MCP & MCR Series
    Mass Flow Controller products measure

    • Mass Flow
    • Volumetric Flow
    • Pressure (PSIA)
    • Temperature (° Celsius or ° Fahrenheit)

    VC, VCP & VCR Series Volumetric Flow Meter products

    • Volumetric Flow


    • Pressure and temperature measurements are taken and displayed in the same unit, alleviating the need for additional measurement devices. (MC, MCP & MCR Series)
    • Mass flow controllers can be set by user to control pressure. It's like having 2 instruments in one. (MC, MCP & MCR Series)
    • MFCs can be tuned for application specific control
    • Multiple digital & analog inputs and outputs
    • Digital and analog input and output available on the same device
    • 100:1 Turndown ratio allows the MFC to measure flow at 1/100th of its full scale rating
    • 30-Gas Select on all units to reduce inventory costs
    • Control range from 1% to 100% of full scale flow
    • Tunable P & D to fine tune instrument's speed of response
    • Optional Remote Display allows for panel mount of the display with full push-button control in embedded applications
    • Optional Remote Electronics allows devices to be installed in high heat applications by separating the flow element from the electronics.
    • Ideal instrument for a variety of processes, including: Fuel cell testing, vacuum coating, sputtering, process automation, semiconductor processing, micro electro mechanical (MEMs), solar cell manufacturing and flame tip control, to name a few.

    30 factory installed, user selectable, gas calibrations:
        • Air
        • Argon
        • Methane
        • Carbon Monoxide
        • Carbon Dioxide
        • Ethane
        • Hydrogen
        • Helium
        • Nitrogen
        • Nitrous Oxide
        • Neon
        • Oxygen
        • Propane
        • Butane
        • Acetylene
        • Ethylene
        • Iso-Butane
        • Krypton
        • Xenon
        • Sulfur Hexaflouride
        • 75% Argon + 25% C02
        • 90% Argon + 10% C02
        • 92% Argon + 8% C02
        • 98% Argon + 2% C02
        • 75% Argon + 25% Helium
        • 75% Helium + 25% Argon
        • 75% CO2 + 25% Argon
        • Helistar® A1025
        • Stargon® CS
        • 95% Argon + 5% CH4


        • RS-232 output of all measured parameters
        • RS-485 available
        • PROFIBUS compatible communication standard
        • DeviceNET compatible communication standard
        • Choice of analog output of main parameter
        • 0-5Vdc, 1-5Vdc, 0-10Vdc, or 4-20mA
        • Local Setpoint
        • RS-232 Setpoint
        • Choice of analog Setpoint Control
        • 0-5Vdc, 1-5Vdc, 0-10Vdc
        • 4-20mA available


        • Alternate STPs for gas units
        • Lower pressure drops
        • Totalization
        • Gas blend calibrations
        • Alternate Units of Measure (SCFM, Kg/M, etc)
        • Downstream valve for vacuum applications
        • Locking 6-pin electrical connection
        • DB-15 connection
        • No Display Units for OEMs
        • Bi-directional flow
        • Alarm drivers
        • Class 1 Div 2 version available.
        • ATEX Approved version available.
        • Available with postive shut off valve. (MCV series) Ideal for high purity vacuum applications.

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    Call (415) 808-2469